ICS 77.060 CCS H 25 中国腐蚀与防护学会团体标准 T/CSCP 0059.1-2025 微机电系统（ MEMS）材料腐蚀芯片及传 感器 第1部分：通用 要求 Micro-Electro-Mechanical Systems (MEMS) material corrosion chip and sensor —— Part 1：General requirements 2025-09-01发布 2025-10-01实施 中国腐蚀与防护学会 发 布 全国团体标准信息平台 全国团体标准信息平台 T/CSCP 0059.1 -2025 目 次 前言 …………………………………………………………………………………………………………… III 引言 ………………………………………………………………………………………………………… ...IV 1 范围 ................................ ................................ ................................ ................................ ................................ 5 2 规范性引用文件 ................................ ................................ ................................ ................................ ............ 5 3 术语和定义 ................................ ................................ ................................ ................................ .................... 5 4 一般要求 ................................ ................................ ................................ ................................ ........................ 6 4.1 外观要求 ................................ ................................ ................................ ................................ .............. 6 4.2 电气特性要求 ................................ ................................ ................................ ................................ ....... 6 4.3 基本性能参数要求 ................................ ................................ ................................ ............................... 6 4.4 结构要求 ................................ ................................ ................................ ................................ .............. 6 5 设计要求 ................................ ................................ ................................ ................................ ........................ 6 5.1 设计原则 ................................ ................................ ................................ ................................ .............. 6 5.2 芯片设计 ................................ ................................ ................................ ................................ .............. 6 5.3 传感器整体设计 ................................ ................................ ................................ ................................ ... 7 5.4 可靠性设计 ................................ ................................ ................................ ................................ .......... 8 5.5 可测试性设计 ................................ ................................ ................................ ................................ ....... 8 6 选材要求 ................................ ................................ ................................ ................................ ........................ 8 6.1 选材原则 ................................ ................................ ................................ ................................ .............. 8 6.2 敏感材料与功能材料 ................................ ................................ ................................ ........................... 8 6.3 结构材料与基体材料 ................................ ................................ ................................ ........................... 9 6.4 封装材料 ................................ ................................ ................................ ................................ .............. 9 6.5 材料兼容性 ................................ ................................ ................................ ................................ ........ 10 6.6 环保与安全要求 ................................ ................................ ................................ ................................ . 10 7 制造要求 ................................ ................................ ................................ ................................ ...................... 10 7.1