ISO/TS TECHNICAL SPECIFICATION 24597 First edition 2011-06-15 Microbeam analysis Scanning electron microscopy Methods of evaluating image sharpness Analyse par microfaisceaux Microscopie électronique a balayage Méthodes d'eévaluation de la nettete d'image Reference number ISO/TS 24597:2011(E) @ ISO 2011 ISO/TS 24597:2011(E) COPYRIGHT PROTECTED DOCUMENT @ISO2011 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, IsO's member body in the country of the requester. ISO copyright office Case postale 56 · CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ ISO 2011-All rights reserved ISO/TS 24597:2011(E) Contents Page Foreword Introduction 1 Scope 2 Normative references. 3 Terms and definitions 4 Steps for acquisition of an SEM image 4.1 General 4.2 Specimen. 4.3 Specimentilt 4.4 Selection of the field of view 4.5 Selection of the pixel size. 4.6 Brightness and contrast of the image. 4.7 Contrast-to-noise ratio of the image .... 4.8 Focus and astigmatism of the image .. 4.9 Interference from external factors .. 4.10 Erroneouscontrast.... 4.11 SEM image data file.. 5 Acquisition of an SEM image and selection of an area within the image 6 Evaluation methods 6.1 General .... 6.2 Contrast-to-noise ratio.. .9 6.3 Fouriertransform(FT)method 6.4 Contrast-to-gradient (CG) method.. 12 6.5 Derivative(DR)method. 7 Test report. 18 7.1 General ... 18 7.2 Contentsoftestreport 18 Annex A (normative) Details of contrast-to-noise ratio (CNR).... Annex B (normative) Details of the Fourier transform (FT) method... ...24 Annex C (normative) Details of the contrast-to-gradient (CG) method.. .40 Annex D (normative) Details of the derivative (DR) method . Annex E (informative) Background to evaluation of image sharpness.. Annex F (informative) Characteristics and suitability of the various evaluation methods ..... Annex G (informative) Method of preparing test specimens for evaluating image sharpness .. Annex H (informative) Example of test report.. Bibliography.... ISO 2011-All rights reserved ii