IEC IEC62047-30 Edition 1.02017-09 INTERNATIONAL STANDARD colour inside Semiconductordevices-Micro-electromechanicaldevices- Part30:Measurementmethodsofelectro-mechanicalconversion characteristics ofMEMSpiezoelectricthinfilm IEC 62047-30:2017-09(en) Copyright Interm out ficense from IHS THIS PUBLICATION IS COPYRIGHTPROTECTED Copyright2017IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or your local IEC member National Committee for further information. IEC Central Office Tel.: +41 22 919 02 11 3,rue de Varembe Fax: +4122919 0300 CH-1211 Geneva 20 [email protected] Switzerland www.iec.ch AbouttheIEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition, a corrigenda or an amendment might have been published. IEc Catalogue-webstore.iec.ch/catalogue Electropedia -www.electropedia.org The stand-alone application for consulting theentire The world's leading online dictionary of electronic and bibliographical information on IEc International Standards, electrical terms containing 20 000 terms and definitions in Technical Specifications,Technical Reportsand other English and French, with equivalent terms in 16 additional documents. Available for PC, Mac OS, Android Tablets and languages. Also known as the International Electrotechnical iPad. Vocabulary (IEV) online. IEC Glossary - std.iec.ch/glossary IEC publicationssearch-www.iec.ch/searchpub The advanced search enables to find IEC publications by a 65 000 electrotechnical terminology entries in English and variety. of criteria(referencenumber, technical French extracted from the Terms and Definitions clause of iEC publications issued since 2002.Some entries have been committee,..). It also gives information on projects, replaced collected from earlier publications of IEC TC 37, 77, 86 and and withdrawn publications. CISPR. IEC JustPublished-webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published IEC Customer Service Centre -webstore.iec.ch/csc details all new publications released. Available online and If you wish to give us your feedback on this publication or also once a month by email. need further assistance,please contact the Customer Service Centre:[email protected] Copyright Intermational Electrotechnical Commission /5926867100, User=JACKEY, MA JEC IEC 62047-30 Edition 1.02017-09 INTERNATIONAL STANDARD colour inside Semiconductordevices-Micro-electromechanicaldevices- Part 3o:Measurement methods ofelectro-mechanical conversion characteristics of MEMS piezoelectric thin film INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99; 31.140 ISBN 978-2-8322-4820-1 Warning!Make sure that you obtained this publication froman authorized distributor. ?Regi Copyright International Elect apun n se with IEC ense from IHS