LEC IEC62047-17 Edition1.0 2015-03 INTERNATIONAL STANDARD NORME INTERNATIONALE colour nside Semiconductor devices-Micro-electromechanicaldevices Part 17: Bulge test method for measuring mechanical properties of thin films Dispositifsasemiconducteurs-Dispositifsmicroelectromecaniques Partie17:Methoded'essaiderenflementpourlamesuredesproprietes mecaniquesdescouchesminces IEC 62047-17:2015-03(en-fr THISPUBLICATIONIS COPYRIGHTPROTECTED Copyright2015IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or your local IEC member National Committee for further information. Droits de reproduction reserves. Sauf indication contraire, aucune partie de cette publication ne peut etre reproduite et les microfilms, sans I'accord ecrit de IIEC ou du Comite national de IIEC du pays du demandeur. Si vous avez des questions sur le copyright de I'lEC ou si vous desirez obtenir des droits supplementaires sur cette publication, utilisez les coordonnees ci-apres ou contactez le Comite national de 'lEC de votre pays de residence. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varembe Fax: +41 22 919 03 00 CH-1211Geneva20 [email protected] Switzerland www.iec.ch AbouttheIEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technologies. AboutIECpublications latest edition, a corrigenda or an amendment might have been published. IEcCatalogue-webstore.iec.ch/catalogue Electropedia-www.electropedia.org The stand-alone application forconsulting the entire The world's leading online dictionaryof electronic and bibliographical information on IEC Intermational Standards, electrical terms containing more than 30 000 terms and Technical Specifications,_Technical Reports andother definitions in English and French, with equivalent terms in 15 documents. Available for PC, Mac OS, Android Tablets and additional languages.Also known as the International iPad. Electrotechnical Vocabulary (IEV) online. IEC publications search-www.iec.ch/searchpub IEC Glossary-std.iec.ch/glossary The advanced search enables to find IEC publications by a More than 60 000 electrotechnical terminology entries in varietyof criteria(referencenumber, text, technical English and French extracted from the Terms and Definitions committee,..). It also gives information on projects, replaced clause of IEC publications issued since 2002.Some entries and withdrawn publications. have been collected from earlier publications of IEC TC 37, 77,86andCISPR IEC JustPublished-webstore.iec.ch/justpublished Stayuptodateon all newIECpublications.JustPublished IEcCustomer Service Centre-webstore.iec.ch/csc details allnewpublicationsreleased.Availableonlineand If you wish to give us your feedback on this publication or also once a month by email. need further assistance, please contact the Customer Service Centre: [email protected]. A propos de IIEC La Commission Electrotechnique Internationale (IEC) est la premiere organisation mondiale qui elabore et publie des Aproposdespublications IEC Le contenu technique des publications IEC est constamment revu.Veuillez vous assurer que vous possedez I'edition la plus recente, un corrigendum ou amendement peut avoir ete publie. CatalogueIEC-webstore.iec.ch/catalogue Electropedia -www.electropedia.org Application autonome pour consulter tous les renseignements Le premier dictionnaire en ligne de termes electroniques et bibliographiques sur Normes internationales, electriques. Il contient plus de 30 000 termes et definitions en Specifications techniques, Rapports techniques_et autres anglais et en francais, ainsi que les termes equivalents