IEC IEC63068-4 Edition1.02022-07 INTERNATIONAL STANDARD Semiconductordevices-Non-destructive recognitioncriteria of defects in siliconcarbidehomoepitaxialwaferforpowerdevices- Part 4:Procedure for identifying andevaluating defects usinga combined methodofoptical inspectionandphotoluminescence IEC 63068-4:2022-07(en) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright@2022 IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or your local IEC member National Committee for further information. IEC Secretariat Tel.: +41 22 919 02 11 3. rue de Varembe [email protected] CH-1211 Geneva 20 www.iec.ch Switzerland About the IEC Intemational Standards for all electrical, electronic and related technologies. About IECpubllcations latest edition, a corrigendum or an amendment might have been published. IEC publications search-webstore.iec.chiadvsearchform IEC Products & Services Portal-products.lec.ch Discover our powerful search engine and read freely all the varietyofcriteria_ (reference publications previews. With a subscription you wll always have number,text. technical commilttee, -), It also gives infomatlon on projects, replaced access to up to date content tallored to your needs. and withdrawn pubilications. Electropedia-www.electropedia.org IEC Just Published - webstore.iec,chjustpublished Stay up to date on all new IEC publications. Just Published containing more than 22 300 temrinological entries in English details all new publications released. Available online and once and French, with equlvalent terms in 19 additional languages. a month by email. Also known as the Intermational Electrotechnical Vocabulary (IEV) online. IEC Customer Service Centre-webstore.lec.ch/csc If you wish to give us your feedback on this publication or need further_ assistanoe,_please contact the Customer Service Centre:[email protected]. IEC IEC63068-4 Edition 1.02022-07 INTERNATIONAL STANDARD Semiconductordevices-Non-destructiverecognitioncriteriaofdefectsin siliconcarbidehomoepitaxialwaferforpowerdevices Part4:Procedureforidentifyingandevaluatingdefects usingacombined methodofoptical inspectionandphotoluminescence INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99 ISBN 978-2-8322-4307-7 Warning! Make sure that you obtained this publication from an authorized distributor. D Fegstarodtaderfatofpe icad Coeiasio