北 19.120. A28 2018 北京 微纳 面积 Micro Micro/na n 8-06-20发粉 纳加工 积表面 o/nanofab r nostructu 发布 体技 工基于 面三维 rication L re Fabric a 北京 技术 于激光 维微纳 Large-are a ation Meth o 粉体技术协 光诱导 纳结构 a Surface od Based o 术协会协会 导应变 构加工 Three-di m n Laser-i n 发布 会标 T/BSPT 0 变的大 工方法 mensional nduced Str 2018-0准 001-2018 大 法 ain 7-01 实施 施T/BSPT 001-2018 II 目 次 封面 .............................................................................................................................. ..................... I 目次 .............................................................................................................................. .................... II 前言 .............................................................................................................................. .................. IV 引言 .............................................................................................................................. .................... V 1 范围 .............................................................................................................................. ................. 1 2 规范性引用文件 ........................................................................................................................... 1 3 术语和定义、缩略语 ................................................................................................................... 1 3.1 术语和定义 .............................................................................................................................. .. 1 3.2 缩略语 .............................................................................................................................. .......... 1 4 原理 .............................................................................................................................. ................. 1 5 材料与设备 .............................................................................................................................. ..... 2 5.1材料 .............................................................................................................................. ............... 2 5.2设备 .............................................................................................................................. ............... 2 6 环境条件 .............................................................................................................................. ......... 3 6.1温度 .............................................................................................................................. ............... 3 6.2湿度 .............................................................................................................................. ............... 3 6.1洁净度 .............................................................................................................................. ........... 3 7 加工程序 .............................................................................................................................. ......... 3 7.1 衬底的清洗 .............................................................................................................................. 3 7.2 双层膜材料体系的制备 .......................................................................................................... 3 7.3 激光刻写二维图案以及三维成形过程 .................................................................................. 4 8 检测及评价指标 ........................................................................................................................... 5 8.1 检测 .............................................................................................................................. .............. 5 T/BSPT 001-2018 III 8.2 评价指标 .............................................................................................................................. ...... 5 附录 A（资料性附录）激光直写系统 ..................................................................................