论文标题
铁电FET的操作和设计用于Beol兼容设备实现
Operation and Design of Ferroelectric FETs for a BEOL Compatible Device Implementation
论文作者
论文摘要
我们介绍了一项基于数值模拟的研究和有关FEFET的操作和设计的最新实验数据的比较分析。我们的结果表明，适当考虑在铁电二电堆中的电荷捕获是必不可少的，对于实验和实现了当前电压特征的所需滞后行为。然后，我们分析了多硅渠道FeFets的一些设计选择，尤其是我们研究了通道厚度和掺杂浓度对记忆窗口的影响，以及依赖性，高和低电阻状态之间的比率。
We present a study based on numerical simulations and comparative analysis of recent experimental data concerning the operation and design of FeFETs. Our results show that a proper consideration of charge trapping in the ferroelectric-dielectric stack is indispensable to reconcile simulations with experiments, and to attain the desired hysteretic behavior of the current-voltage characteristics. Then we analyze a few design options for polysilicon channel FeFETs and, in particular, we study the influence of the channel thickness and doping concentration on the memory window, and on the ratio between the polarization dependent, high and low resistance state.
